Graphite and C/C Components for the Semiconductor Industry – Svenska Tanso AB
Toyo Tanso develops and manufactures high-purity graphite and C/C components with advanced surface coatings for demanding applications in the semiconductor industry. Our products are essential for polysilicon production, crystal growing , and various wafer processing technologies such as MOCVD, EPI, and CVD/PVD .
Our product portfolio includes:
Heaters and support crucibles – engineered for maximum stability and uniform temperature control.
Heat shields and insulation components – designed for energy efficiency and extended lifetime in crystal growth processes.
Susceptors for epitaxy and MOCVD reactors – produced in high purity to ensure contamination-free processing and optimal performance.
World-class quality and purity
By combining the purification furnace at GTD Graphit Technologie GmbH with Toyo Tanso’s state-of-the-art production facilities in Japan, we can deliver components in a wide range of designs, coating options, and purity levels – tailored to your specific needs.
Why choose Toyo Tanso?
Proven expertise in semiconductor applications
Components for critical processes such as MOCVD, EPI, and CVD/PVD
High-purity solutions with customizable designs
Global production capacity with reliable technical support
With Toyo Tanso, you benefit from a supplier that combines material excellence, advanced production, and deep technical expertise – ensuring superior performance in the most demanding semiconductor processes.